Multi-Deposition Tool with gloves box
High-vacuum deposition processes enable the fabrication of thin films using sputtering and thermal evaporation techniques. These processes facilitate the creation of electrical contacts, transport layers, and coatings for next-generation solar cells. Such techniques optimize efficiency and stability by reducing series resistance and improving current extraction in photovoltaic sub-modules.
KORVUS HEX-L, VIGOR
This system enables precise material deposition using both sputtering and thermal evaporation techniques. Designed for electrical contact fabrication and functional coatings, it operates at an ultra-low pressure of <10⁻⁶ bar, minimizing contamination in deposited films.
Key features include:
- 300 L vacuum chamber with turbo pumping system.
- Four-channel process pressure control.
- TORUS® 2” or 3” magnetron sources with temperature control.
- Sample holder with variable rotation speed up to 20 rpm.
- Multi-layer and composite material deposition capabilities.
- RF and DC magnetron power sources with adjustable power control.
- Heated sample holder up to 800°C for optimized deposition.
- Computerized control system for programmable deposition processes.
- Vacuum chamber with contamination protection for residual gases.